MEMS and Microsystems : design and manufacture /

Hsu, Tai-Ran.

MEMS and Microsystems : design and manufacture / Tai-Ran Hsu. - Boston : McGraw-Hill, c2002. - xii, 436 p. : ill. ; 25 cm.

Includes bibliographical references (p. 427-431) and index.

0072393912 0071130519 (ISE)


Microelectronics.
Microelectromechanical systems.
Microelectronic packaging.

621.381 / HSU