Micromachined Transducers Sourcebook /
Kovacs, Gregory T. A.
Micromachined Transducers Sourcebook / Gregory T.A. Kovacs. - Boston : WCB McGraw-Hill, c1998. - xx, 911, [3] p. : ill. ; 25 cm.
Includes bibliographical references (p. 883-899) and index.
0072907223
Transducers.
Microelectromechanical systems.
681.2 / KOV
Micromachined Transducers Sourcebook / Gregory T.A. Kovacs. - Boston : WCB McGraw-Hill, c1998. - xx, 911, [3] p. : ill. ; 25 cm.
Includes bibliographical references (p. 883-899) and index.
0072907223
Transducers.
Microelectromechanical systems.
681.2 / KOV