Normal view MARC view

Microelectromechanical systems.(Topical Term)

Preferred form: Microelectromechanical systems.

Machine generated authority record.

Machine generated authority record.

Work cat.: (OSt)0: Hsu, Tai-Ran. 3141, MEMS and Microsystems :, c2002.

Work cat.: (OSt)0: Hsu, Tai-Ran. 3141, MEMS and Microsystems :, c2002.