Normal view
MARC view
Microelectromechanical systems.(Topical Term)
Machine generated authority record.
Machine generated authority record.
Work cat.: (OSt)0: Hsu, Tai-Ran. 3141, MEMS and Microsystems :, c2002.
Work cat.: (OSt)0: Hsu, Tai-Ran. 3141, MEMS and Microsystems :, c2002.