TY - BOOK AU - Kovacs,Gregory T.A. TI - Micromachined Transducers Sourcebook SN - 0072907223 U1 - 681.2 21 PY - 1998/// CY - Boston PB - WCB McGraw-Hill KW - Transducers KW - Microelectromechanical systems N1 - Includes bibliographical references (p. 883-899) and index UR - http://www.loc.gov/catdir/description/mh023/98004846.html UR - http://www.loc.gov/catdir/toc/mh022/98004846.html ER -